Products > Fab Processes > IBM > IBM 90 Nanometer 9LP/9RF Process
IBM 9LP/9RF CMOS Process
90 Nanometer (90 nm)
If your design will be used for production, i.e. non-MPW, please read the IBM policy described in "Checking and Error Disposition Strategy for IBM Designs."
MOSIS is offering access to the IBM 90 nm CMOS 9LP/9RF technology for prototype and low volume fabrication. This is the low-power variant of the IBM 90 nm CMOS 9SF technology. C4 (IBM's flip chip bumping) is subject to availability at additional cost. Advance notice required. Please submit your inquiry to the MOSIS Support System.
Supported metal Stacks:
Digital: M1, M2, M3, M4, M5, M6, M1_2B, M2_2B, LB
Analog: M1, M2, M3, M4, M5, M1_2B, OL, LD
Supply voltages are 1.2 V core and 2.5 V I/O. MOSIS offers this CMOS process with two distinct metal stacks.
A digital stack with 9 metal layers
(M1, M2, M3, M4, M5, M6, M1_2B, M2_2B) and LB topmetal to DV (glass cut). This is the IBM "9LB_6_02_00_00" stack, with six thin metals over low-K dielectric, two thick metals ("2x") over TEOS/FTEOS dielectric, no "4x" metals, LB topmetal, and QT+HT dual nitrade MiM capacitor.
An analog stack with 8 metal layers
(M1, M2, M3, M4, M5, M1_2B, OL and LD topmetal to DV (glass cut). This is the IBM "8LD_5_01_00_01" stack, with five thin metals over low-K dielectric, one thick metal ("2x") over TEOS/FTEOS dielectric, no "4x" metals, OL, LD topmetal, and QT+HT dual nitrade MiM capacitor.
Please refer to the List of 9LP/9RF Supported Options page for the options available on MOSIS MPW runs in this technology. You may not submit a design containing any options or metals stack which are not listed here without prior arrangement with MOSIS. Note that the QT/HT MiM is used with the "digital" stack, but QK/HK is used with the "analog" stack. Other configurations are available for dedicated runs.
To ensure that submitted data is on a 5 nm grid, please stream-out at 1 DBU = 5 nm (Cadence 0.005, not 0.001).
MOSIS does not fill for IBM processes. Designs for IBM runs must meet the IBM fill requirements when submitted.
The CAD tool support files, DRC and LVS decks, simulation files, cell libraries, and files listed on the IBM CMOS Design Kits page are the only kits and files available. MOSIS distributes "IBM" as opposed to "CP" (Common Platform) design kits.
Design rules supported by this technology
Only the IBM design rules will be supported for this technology.
Layouts may be submitted to the 9LP/9RF process using either technology code IBM_9LP or IBM_9RF. These are absolute synonymns to MOSIS: "analog" and "digital" stacks may be submitted using either technology code.
Parametric Test Results and SPICE Model Parameters
Reticle/Wafer Size, Steps, Die and Wafer Thickness
|Reticle Size (milli- meters, approx.)||Reticle Copies Stepped on Wafer (approx.)||
(+/- .5 mil)
Bumped Die Thickness *
(+/- .5 mil)
|Mils||Micro- meters||Mils||Micro- meters||Mils||Micro- meters|
|8||18 x 20||60||10||250||10||250||30||760|
* Die thickness only. Does not include height of the bumps.
To order a special bumped die thickness, describe your requirements in the SPECIAL-HANDLING parameter of your New Project, Fabrication, or Update Request.